NPSS 奈米圖案化藍寶石晶圓Nano-Patterned Sapphire Substrate (NPSS)
1)蛾眼結構圖形化晶圓 (Moth Eye Structure Wafer)
Moth eye Patterned Sapphire Substrate SEM image 2)奈米尖錐狀圖形化晶圓 (Cone Type nPSS Wafer) 
Cone type nPSS SEM image 3)奈米孔洞狀圖形化晶圓 (Hole Type nPSS Wafer) 
Hole type nPSS SEM image
產品特色 Characteristics of Products
- 適用於高晶體質量材料磊晶成長
- 降低氮化鎵基薄膜單位面積上的缺陷密度
- 提升內部量子效率
- 提升LED器件的光萃取效能
- High crystal quality materials epitaxial growth base
- Less dislocations and defects caused by materials' mismatch in the GaN-based layers
- Improved the Internal Quantum Efficiency
- Increased the Light Extraction Efficiency
藍寶石基板特性 Characteristics of Sapphire Substrate
- Property Characteristics Unit
- Material 2” High purity monocrystalline (Al2O3)
- Surface Orientation C-Plane (0001)
- Off-set Angle toward M-axis 0.20 + 0.1 Degree
- Off-set Angle toward A-axis 0.0 + 0.25 Degree
- Orientation Flat A-Plane (11-20)
- Flat Off-set Angle 0.00 + 0.25 Degree
- Flat Length 16.0 + 1 mm
- Diameter 50.8 + 0.25 mm
- Thickness 430 + 25 µm
- TTV < 10 µm
- BOW - 10 ~ 0 µm
- WARP < 15 µm
- Back surface roughness 0.8 < Ra < 1.3 µm